Hydrogen Generators for Electronics Manufacturing
Ultra-pure on-site hydrogen generation for semiconductor fabrication, CVD processes, and advanced electronics production with purity up to 99.9999%.
Why Hydrogen for Electronics Manufacturing?
Semiconductor fabrication demands the highest purity gases to prevent contamination and ensure defect-free production. Our hydrogen generators deliver semiconductor-grade hydrogen with purity up to 99.9999% (6N), essential for critical processes including CVD, epitaxial growth, wafer processing, and thin film deposition.
On-site hydrogen generation eliminates contamination risks from cylinder handling, ensures continuous supply for 24/7 fab operations, and provides significant cost savings for high-volume semiconductor manufacturing. Ultra-low particle count and contamination-free delivery make our systems ideal for cleanroom environments.
Electronics Manufacturing Applications
Critical hydrogen applications in semiconductor and electronics production
CVD Processes
Chemical vapor deposition for silicon epitaxy, polysilicon deposition, and silicon nitride formation in semiconductor manufacturing.
Thin Film Deposition
Carrier and reducing gas for PECVD, LPCVD, and ALD processes. Critical for gate oxides, dielectrics, and barrier layers.
Wafer Processing
Reducing atmosphere for wafer cleaning, oxide removal, and surface preparation before critical processing steps.
Epitaxial Growth
Carrier gas for silicon and compound semiconductor epitaxy. Essential for power devices and advanced logic chips.
Annealing Processes
Forming gas (H₂/N₂) for thermal annealing, reducing defects and improving electrical properties of semiconductor devices.
Display Manufacturing
TFT-LCD and OLED production processes requiring ultra-pure hydrogen for thin film transistor fabrication.
Key Benefits
Critical advantages for semiconductor manufacturing facilities
Zero Contamination
Eliminate contamination risks from cylinder handling and delivery. Freshly generated hydrogen ensures maximum purity for cleanroom environments.
Supply Reliability
Continuous on-site production eliminates supply chain disruptions and ensures 24/7 fab operations without interruption.
Cost Optimization
Significant cost savings for high-volume semiconductor manufacturing compared to delivered hydrogen cylinders.
Ultra-High Purity
Semiconductor-grade hydrogen up to 99.9999% (6N) with ultra-low particle count for defect-free production.
Scalable Capacity
Flexible hydrogen production from pilot lines to high-volume manufacturing with precise flow control and pressure regulation.
Enhanced Safety
Minimize hydrogen storage in fab environments, reducing safety risks while maintaining continuous supply for production.
Technical Specifications
Gas Quality
- Purity:Up to 99.9999%
- Moisture:< 3 ppm
- Particles:< 0.1 μm
Operating Parameters
- Flow Rate:10-500 Nm³/h
- Pressure:Up to 30 bar
- Technology:PEM Electrolysis
Optimize Your Semiconductor Production
Contact us to discuss your hydrogen requirements and discover how our generators can enhance your electronics manufacturing operations.