DX Model PSA Nitrogen Gas Plants
When applications demand nitrogen purity levels of 99.999% or higher, our Deoxo Nitrogen Purification Units provide the perfect solution. These specialized systems are designed to remove residual oxygen from nitrogen gas streams, achieving ultra-high purity levels suitable for the most demanding applications in electronics, pharmaceuticals, and specialty manufacturing.

Technology Options
We offer two distinct purification technologies to meet your specific requirements for ultra-high purity nitrogen
Palladium Based Purification System
In this system, a deoxo tower is added after the PSA plant where hydrogen reacts with oxygen, effectively removing oxygen from the nitrogen stream. The moisture formed during this reaction is removed in a downstream gas dryer, resulting in ultra-high purity nitrogen.
Output Gas Composition:
- Nitrogen: 99.999%
- Oxygen: ppm level
- Hydrogen: 0.5% min. or more if required
- Dew point: -60°C or better
Copper Based Deoxo Purification System
When both hydrogen and oxygen are undesirable in the final gas stream, our copper deoxo based system provides an excellent solution. This technology effectively eliminates both hydrogen and oxygen, delivering ultra-high purity nitrogen without residual hydrogen.
Output Gas Composition:
- Nitrogen: 99.999%
- Oxygen: ppm level
- Hydrogen: Nil to ppm level
- Dew point: -60°C or better
Applications
Ultra-high purity nitrogen is essential for various specialized applications
Semiconductor Manufacturing
Ultra-high purity nitrogen for wafer fabrication, chip packaging, and clean room environments where even trace impurities can cause defects.
Pharmaceutical Production
For blanketing, packaging, and processing of sensitive pharmaceutical compounds where oxygen contamination must be eliminated.
Specialty Chemical Processing
For reactions and processes that require an inert atmosphere with virtually no oxygen or moisture contamination.
Electronics Manufacturing
For soldering, wave soldering, and other processes where oxidation must be prevented to ensure product quality.
Laboratory & Research
For analytical instruments, glove boxes, and research applications requiring ultra-high purity nitrogen environments.
Optical Fiber Production
For manufacturing high-quality optical fibers where even trace oxygen can affect performance and signal transmission.
Features & Benefits
Our Deoxo Nitrogen Purification Units offer numerous advantages for your operations
System Features
- Modular Design: Easily integrated with existing PSA nitrogen plants
- Automated Operation: Fully automated control systems with minimal operator intervention
- Continuous Monitoring: Real-time purity monitoring and quality assurance
- Energy Efficient: Optimized design for minimal energy consumption
- Long Catalyst Life: Extended service intervals with high-quality catalysts
Customer Benefits
- Cost Savings: On-site generation eliminates the need for expensive cylinder or liquid nitrogen
- Supply Security: Reliable, continuous supply without dependence on external vendors
- Customizable Purity: Systems can be tailored to your exact purity requirements
- Reduced Carbon Footprint: Lower environmental impact compared to delivered nitrogen
- Technical Support: Comprehensive after-sales service and technical assistance
Need Ultra-High Purity Nitrogen?
Contact our engineering team to discuss your specific requirements and get a customized solution for your application.