Deoxo Nitrogen
Purification Units
When applications demand nitrogen purity of 99.999% or higher, our Deoxo Nitrogen Purification Units deliver advanced purification—removing residual oxygen to achieve ultra-high purity nitrogen for electronics, pharmaceutical, and precision manufacturing applications.
Purification Technologies
Two distinct purification technologies to meet your specific ultra-high purity nitrogen requirements
Palladium Based System
A deoxo tower is added after the PSA plant where hydrogen reacts with oxygen, effectively removing oxygen from the nitrogen stream. Moisture formed during this reaction is removed in a downstream gas dryer, resulting in ultra-high purity nitrogen.
Output Gas Composition:
- Nitrogen: 99.999%
- Oxygen: ppm level
- Hydrogen: 0.5% min. or more if required
- Dew point: -60°C or better
Copper Based System
When both hydrogen and oxygen are undesirable in the final gas stream, our copper deoxo based system provides an excellent solution. This technology effectively eliminates both hydrogen and oxygen, delivering ultra-high purity nitrogen without residual hydrogen.
Output Gas Composition:
- Nitrogen: 99.999%
- Oxygen: ppm level
- Hydrogen: Nil to ppm level
- Dew point: -60°C or better
Applications
Ultra-high purity nitrogen is essential for various specialized applications requiring minimal oxygen contamination
Semiconductor Manufacturing
Ultra-high purity nitrogen for wafer fabrication, chip packaging, and clean room environments where even trace impurities can cause defects.
Pharmaceutical Production
For blanketing, packaging, and processing of sensitive pharmaceutical compounds where oxygen contamination must be eliminated.
Heat Treatment & Metal Processing
For heat treatment, annealing, and metal processing operations requiring an inert atmosphere with virtually no oxygen contamination.
Electronics Manufacturing
For soldering, wave soldering, and other processes where oxidation must be prevented to ensure product quality.
Laboratory & Research
For analytical instruments, glove boxes, and research applications requiring ultra-high purity nitrogen environments.
Optical Fiber Production
For manufacturing high-quality optical fibers where even trace oxygen can affect performance and signal transmission.
Features & Benefits
Comprehensive advantages of our Deoxo Nitrogen Purification Units for your operations
Cost Savings
On-site generation eliminates the need for expensive cylinder or liquid nitrogen, reducing operational costs significantly.
Supply Security
Reliable, continuous supply without dependence on external vendors. Never run out of ultra-high purity nitrogen.
Customizable Purity
Systems can be tailored to your exact purity requirements, ensuring optimal performance for your specific application.
Reduced Carbon Footprint
Lower environmental impact compared to delivered nitrogen, supporting your sustainability goals.
Energy Efficient
Optimized design for minimal energy consumption while maintaining the highest purity standards.
Technical Support
Comprehensive after-sales service and technical assistance from our expert engineering team.
Ready to Get Started?
Contact our engineering team today to discuss your specific requirements and discover how our Deoxo Nitrogen Purification Units can deliver the ultra-high purity nitrogen your application demands.